MKS GE50A558203RSV010 Регулятор массового расхода
Купите регулятор массового расхода MKS GE50A558203RSV010. Этот прецизионный РМР имеет диапазон расхода 2000 SCCM, цифровую связь RS485 и специально настроен для газовых смесей 1% B2H6/N2 (диборан/азот). Идеально подходит для надежной и точной подачи газа в оборудовании для производства полупроводников.
Регулятор массового расхода MKS GE50A558203RSV010
Регулятор массового расхода MKS Instruments GE50A558203RSV010 — это высокопроизводительный РМР, разработанный для точного измерения и контроля газового потока в производстве полупроводников и передовых промышленных приложениях. Данный прибор откалиброван на диапазон расхода 2000 SCCM и настроен на газовую смесь 1% B2H6/N2 (1% диборана в азоте). Работает от питания +11…25 В пост. тока, оснащён надёжным цифровым интерфейсом RS485 для бесшовной интеграции в современные системы управления. Устройство имеет верхние светодиодные индикаторы состояния «Ноль», «Ошибка» и «Связь», обеспечивающие быструю и простую полевую диагностику.
Технические характеристики:
- Производитель: MKS Instruments
- Номер модели: GE50A558203RSV010
- Полный диапазон: 2000 SCCM
- Конфигурация газа: 1% B2H6/N2 (1% диборана в азоте)
- Требования к питанию: +11…25 В пост. тока
- Интерфейс связи: RS485
- Распиновка RS485: Контакт 5 B/B’ (RS485+), контакт 7 общий RS485, контакт 9 A/A’ (RS485-)
- Визуальные индикаторы: Светодиоды «Ноль», «Ошибка», «Связь»
- Соответствие: Маркировка CE
| Brand | MKS |
|---|---|
| Model | GE50A558203RSV010 |
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